TY  - GEN
AU  - Charles Tarrio
C2  - Journal of Research (NIST JRES), National Institute of Standards and Technology, Gaithersburg, MD
DA  - 2009-05-01
LA  - en
M1  - 114
PB  - Journal of Research (NIST JRES), National Institute of Standards and Technology, Gaithersburg, MD
PY  - 2009
TI  - Method for the characterization of extreme-ultraviolet photoresist outgassing
UR  - https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=842566
ER  -