TY - CONF AU - Bryan Barnes AU - Francois Goasmat AU - Martin Sohn AU - Hui Zhou AU - Abraham Arceo C2 - Proceedings of the SPIE, San Jose, CA DA - 2013-04-10 DO - https://doi.org/10.1117/12.2012250 LA - en M1 - 8681 PB - Proceedings of the SPIE, San Jose, CA PY - 2013 TI - Enhancing 9 nm Node Dense Patterned Defect Optical Inspection using Polarization, Angle, and Focus ER -