TY - JOUR AU - Robert Berg C2 - Review of Scientific Instruments DA - 2004-03-01 LA - en M1 - 75 PB - Review of Scientific Instruments PY - 2004 TI - Quartz capillary flow meter for gases UR - https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=915338 ER -