TY - JOUR AU - Jay Hendricks AU - M Aquino-Class AU - James Maslar AU - Michael Zachariah C2 - Chemistry of Materials DA - 1998-07-01 LA - en M1 - No. 10 PB - Chemistry of Materials PY - 1998 TI - Metal and Ceramic Thin Film Growth by Reaction of Alkali Metals with Metal Halides: A New Route for Low Temperature CVD ER -