TY - JOUR
AU - Kristen
AU - Mark Sobolewski
C2 - Journal of Vacuum Science and Technology A
DA - 1999-03-01
LA - en
M1 - 17
PB - Journal of Vacuum Science and Technology A
PY - 1999
TI - Planar Laser-Induced Fluorescence of CF2 in O2/CF4 and O2/C2F6 Chamber-Cleaning Plasmas: Spatial Uniformity and Comparison to Electrical Measurements
ER -