TY - JOUR AU - Kristen AU - Mark Sobolewski C2 - Journal of Vacuum Science and Technology A DA - 1999-03-01 LA - en M1 - 17 PB - Journal of Vacuum Science and Technology A PY - 1999 TI - Planar Laser-Induced Fluorescence of CF2 in O2/CF4 and O2/C2F6 Chamber-Cleaning Plasmas: Spatial Uniformity and Comparison to Electrical Measurements ER -