TY  - JOUR
AU  - Eric Vogel
C2  - Nature Nanotechnology
DA  - 2007-01-01
LA  - en
M1  - 2
PB  - Nature Nanotechnology
PY  - 2007
TI  - Technology and Metrology of New Electronic Materials and Devices
UR  - https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=32358
ER  -