TY  - CONF
AU  - Stephen Knight
C2  - Characterization and Metrology for ULSI Technology, Austin, TX
DA  - 2003-09-01
LA  - en
M1  - 683
PB  - Characterization and Metrology for ULSI Technology, Austin, TX
PY  - 2003
TI  - Development of Metrology at NIST For the Semiconductor Industry
UR  - https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=31402
ER  -