TY  - CONF
AU  - Lin You
AU  - Emily Hitz
AU  - Jungjoon Ahn
AU  - Yaw Obeng
AU  - Joseph Kopanski
C2  - 2013 International Semiconductor Device Research Symposium, Bethesda, MD
DA  - 2013-12-13
LA  - en
PB  - 2013 International Semiconductor Device Research Symposium, Bethesda, MD
PY  - 2013
TI  - Back-End-of-Line Test Structure Design and Simulation for Subsurface Metrology with Scanning Probe Microscopy
ER  -