TY  - JOUR
AU  - David Seiler
C2  - IEEE Transactions on Semiconductor Manufacturing
DA  - 2006-11-01
LA  - en
PB  - IEEE Transactions on Semiconductor Manufacturing
PY  - 2006
TI  - Special Section on the International Conference on Frontiers of Characterization and Metrology for Nanoelectronics
UR  - https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=32443
ER  -