TY  - CONF
AU  - John Suehle
C2  - Proc.,  ASTM Conference on Gate Dielectric Integrity, Paris, FR
DA  - 1999-01-15
LA  - en
PB  - Proc.,  ASTM Conference on Gate Dielectric Integrity, Paris, FR
PY  - 1999
TI  - Ultra-Thin Film Dielectric Reliability Characterization
ER  -