TY  - CONF
AU  - Eric Vogel
C2  - Proceedings of the 8th International Symposium on Silicon Nitride, Silicon Dioxide Thin Insulating Films and Other Emerging Dielectrics
DA  - 2005-01-30
LA  - en
M1  - 2005
PB  - Proceedings of the 8th International Symposium on Silicon Nitride, Silicon Dioxide Thin Insulating Films and Other Emerging Dielectrics
PY  - 2005
TI  - Physical Mechanisms of Ultra-thin Silicon Dioxide Degradation and Breakdown
ER  -