TY - GEN AU - John Albers C2 - Special Publication (NIST SP), National Institute of Standards and Technology, Gaithersburg, MD DA - 1992-06-01 LA - en M1 - 400 PB - Special Publication (NIST SP), National Institute of Standards and Technology, Gaithersburg, MD PY - 1992 TI - Semiconductor Measurement Technology: Version 2.0 of the TXYZ Thermal Analysis Program: TXYZ20 ER -