TY - GEN AU - Erik Secula C2 - NIST Interagency/Internal Report (NISTIR), National Institute of Standards and Technology, Gaithersburg, MD DA - 2003-02-11 LA - en PB - NIST Interagency/Internal Report (NISTIR), National Institute of Standards and Technology, Gaithersburg, MD PY - 2003 TI - Semiconductor Electronics Division Programs, Activities, and Accomplishments 2002 ER -