TY  - CONF
AU  - Brian Rennex
C2  - Proc. Intl. Soc. for Optical Engineering (SPIE), Fourier Transform Spectroscopy VII, Fairfax, VA
DA  - 1989-12-31
LA  - en
M1  - 1145
PB  - Proc. Intl. Soc. for Optical Engineering (SPIE), Fourier Transform Spectroscopy VII, Fairfax, VA
PY  - 1989
TI  - Fourier Transform Infrared (FTIR) Determination of Interstitial Oxygen Concentration of Single-Side-Polished Silicon Wafers
ER  -