TY  - CONF
AU  - John Suehle
C2  - Proc., 1998 International Conference on Characterization and Metrology for ULSI Technology, Gaithersburg, MD
DA  - 1998-12-31
LA  - en
PB  - Proc., 1998 International Conference on Characterization and Metrology for ULSI Technology, Gaithersburg, MD
PY  - 1998
TI  - Reliability Characterization of Ultra-Thin Film Dielectrics
ER  -