TY  - CONF
AU  - Kristine Bertness
AU  - Lawrence Robins
AU  - J Armstrong
AU  - Ryna Marinenko
AU  - Albert Paul
AU  - Marc Salit
C2  - Tech. Dig., CS-MAX 2002, Compound Semiconductor Mfg. Expo, San Jose, CA
DA  - 2002-11-11
LA  - en
PB  - Tech. Dig., CS-MAX 2002, Compound Semiconductor Mfg. Expo, San Jose, CA
PY  - 2002
TI  - Composition standards for III-V semiconductor epitaxial films
UR  - https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=30845
ER  -