TY  - CONF
AU  - Eric Vogel
C2  - Proc., Workshop on Dielectrics in Microelectronics, Grenoble, FR
DA  - 2002-11-30
LA  - en
PB  - Proc., Workshop on Dielectrics in Microelectronics, Grenoble, FR
PY  - 2002
TI  - Issues with Electrical Characterization of Advanced Gate Dielectrics in Metal-oxide-semiconductor devices
ER  -