TY  - CONF
AU  - James Potzick
C2  - Proc. Intl. Soc. for Optical Engineering (SPIE), Integrated Circuit Metrology, Inspection, and Process Control III, Los Angeles, CA
DA  - 1989-12-31
LA  - en
M1  - 1087
PB  - Proc. Intl. Soc. for Optical Engineering (SPIE), Integrated Circuit Metrology, Inspection, and Process Control III, Los Angeles, CA
PY  - 1989
TI  - Automated Calibration of Optical Photomask Linewidth Standards at the National Institute of Standards and Technology
ER  -