TY  - CONF
AU  - Day, Gordon
C2  - Proc., SPIE, Harnessing Light,  Optical Science and Metrology at NIST, San Diego, CA
DA  - 2001-07-01
LA  - en
M1  - 4450
PB  - Proc., SPIE, Harnessing Light,  Optical Science and Metrology at NIST, San Diego, CA
PY  - 2001
TI  - Metrology for the Optoelectronics Industry
ER  -