TY  - GEN
AU  - John Albers
C2  - Special Publication (NIST SP), National Institute of Standards and Technology, Gaithersburg, MD
DA  - 1995-08-01
LA  - en
M1  - 400
PB  - Special Publication (NIST SP), National Institute of Standards and Technology, Gaithersburg, MD
PY  - 1995
TI  - Semiconductor Measurement Technology: HOTPAC: Programs for Thermal Analysis Including Version 3.0 of the TXYZ Program, TXYZ30, and the Thermal MultiLayer Program, TML
ER  -