TY  - CONF
AU  - James Potzick
C2  - Proceedings of SPIE, 17th Annual BACUS Symposium on Photomask Technology and Management, James A. Reynolds, Brian J. Grenon, Editors, Redwood City, CA
DA  - 1997-02-01
LA  - en
M1  - 3236
PB  - Proceedings of SPIE, 17th Annual BACUS Symposium on Photomask Technology and Management, James A. Reynolds, Brian J. Grenon, Editors, Redwood City, CA
PY  - 1997
TI  - Photomask Metrology in the Era of Neolithography
ER  -