TY - CONF AU - John Villarrubia AU - Andras Vladar AU - J Lowney AU - Michael Postek AU - Richard Allen AU - Michael Cresswell AU - Rathindra Ghoshtagore C2 - Proceedings of SPIE, Metrology, Inspection, and Process Control for Microlithography XIV, Neal T. Sullivan, Editor, Santa Clara, CA DA - 2000-06-01 LA - en M1 - 3998 PB - Proceedings of SPIE, Metrology, Inspection, and Process Control for Microlithography XIV, Neal T. Sullivan, Editor, Santa Clara, CA PY - 2000 TI - Linewidth Measurement Intercomparison on a BESOI Sample ER -