TY  - CONF
AU  - Richard Silver
AU  - Theodore Doiron
AU  - William Penzes
AU  - S Fox
AU  - Edward Kornegay
AU  - S Rathjen
AU  - M Takac
AU  - D Owen
C2  - Proceedings of SPIE, Metrology, Inspection, and Process Control for Microlithography XIII, Bhanwar Singh, Editor, Santa Clara, CA
DA  - 1999-06-01
LA  - en
M1  - 3677
PB  - Proceedings of SPIE, Metrology, Inspection, and Process Control for Microlithography XIII, Bhanwar Singh, Editor, Santa Clara, CA
PY  - 1999
TI  - Two-Dimensional Calibration Artifact and Measurement Methodology
ER  -