TY  - JOUR
AU  - Theodore Doiron
AU  - Theodore Vorburger
AU  - P Sullivan
C2  - Precision Engineering-Journal of the International Societies for Precision Engineering and Nanotechnology
DA  - 1999-07-01
LA  - en
M1  - 23(3)
PB  - Precision Engineering-Journal of the International Societies for Precision Engineering and Nanotechnology
PY  - 1999
TI  - Effects of Defocus and Algorithm on Optical Step Height Calibration
ER  -