TY  - CONF
AU  - John Kramar
AU  - Jay Jun
AU  - William Penzes
AU  - Fredric Scire
AU  - E Teague
AU  - John Villarrubia
C2  - Proceedings of the EUSPEN Topical Conference on Fabrication and Metrology in Nanotechnology, Copenhagen, DE
DA  - 2000-05-01
LA  - en
M1  - 1
PB  - Proceedings of the EUSPEN Topical Conference on Fabrication and Metrology in Nanotechnology, Copenhagen, DE
PY  - 2000
TI  - Molecular Measuring Machine Design and Measurements
ER  -