TY - JOUR AU - John Kramar C2 - Measurement Science & Technology DA - 2005-09-23 LA - en M1 - 16 PB - Measurement Science & Technology PY - 2005 TI - Nanometer Resolution Metrology with the NIST Molecular Measuring Machine UR - https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=822533 ER -