TY - JOUR AU - John Dagata AU - F Perez-murano AU - C Martin AU - H Kuramochi AU - H Yokoyama C2 - Journal of Applied Physics DA - 2004-08-15 LA - en M1 - 96 PB - Journal of Applied Physics PY - 2004 TI - Current, Charge, and Capacitance During Scanning Probe Oxidation. I. Maximum Charge Density and Lateral Diffusion ER -