TY  - JOUR
AU  - Joseph Fu
AU  - Hui Zhou
AU  - John Kramar
AU  - Richard Silver
AU  - S Gonda
C2  - Applied Physics Letters
DA  - 2003-05-01
LA  - en
M1  - 82
PB  - Applied Physics Letters
PY  - 2003
TI  - Dependency of Morphology on Miscut Angle for Si(111) Etched in NH<sub>4</sub>F
UR  - https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=823151
ER  -