TY  - CONF
AU  - John Villarrubia
C2  - Proceedings of American Institute of Physics International Conference on Characterization and Metrology for ULSI Technology 2005, Richardson, TX
DA  - 2005-09-09
LA  - en
M1  - 788
PB  - Proceedings of American Institute of Physics International Conference on Characterization and Metrology for ULSI Technology 2005, Richardson, TX
PY  - 2005
TI  - Issues in Line Edge and Linewidth Roughness Metrology
ER  -