TY  - CONF
AU  - Hui Zhou
AU  - Joseph Fu
AU  - S Gonda
AU  - Richard Silver
C2  - Procedings of SPIE, Nanostructure Science, Metrology, and Technology, Martin C. Peckerar, Michael T. Postek, Jr., Editors, Gaithersburg, MD
DA  - 2002-01-01
LA  - en
M1  - 4608
PB  - Procedings of SPIE, Nanostructure Science, Metrology, and Technology, Martin C. Peckerar, Michael T. Postek, Jr., Editors, Gaithersburg, MD
PY  - 2002
TI  - Effects of Etching Time and Wafer Miscut on the Morphology of Etched Si(111) Surfaces
ER  -