TY  - CONF
AU  - Ronald Dixson
AU  - Theodore Vorburger
AU  - Angela Guerry
AU  - Marylyn Bennett
AU  - B Bunday
C2  - Proceedings of SPIE, Metrology, Inspection, and Process Control for Microlithography XVII, Daniel J. Herr, Editor, Santa Clara, CA
DA  - 2003-05-01
LA  - en
M1  - 5038
PB  - Proceedings of SPIE, Metrology, Inspection, and Process Control for Microlithography XVII, Daniel J. Herr, Editor, Santa Clara, CA
PY  - 2003
TI  - Implementation of a Reference Measurement System Using CD-AFM
ER  -