TY  - CONF
AU  - John Kramar
AU  - E Amatucci
AU  - David Gilsinn
AU  - Jay Jun
AU  - William Penzes
AU  - Fredric Scire
AU  - E Teague
AU  - John Villarrubia
C2  - Proceedings of SPIE, Metrology, Inspection, and Process Control for Microlithography XIII, Bhanwar Singh, Editor, Santa Clara, CA
DA  - 1999-06-01
LA  - en
M1  - 3677
PB  - Proceedings of SPIE, Metrology, Inspection, and Process Control for Microlithography XIII, Bhanwar Singh, Editor, Santa Clara, CA
PY  - 1999
TI  - Toward Nanometer Accuracy Measurements
ER  -