TY  - CONF
AU  - E Teague
C2  - Proceedings of SPIE, Microlithography and Metrology in Micromachining, Michael T. Postek, Editor, Austin, TX
DA  - 1995-09-01
LA  - en
M1  - 2640
PB  - Proceedings of SPIE, Microlithography and Metrology in Micromachining, Michael T. Postek, Editor, Austin, TX
PY  - 1995
TI  - 1/N Feynman Machines as a Path to Ultraminiaturization
ER  -