TY  - CONF
AU  - T Mcwaid
C2  - Proceedings of Japan Society for Precision Engineering: U.S.-Japan Workshop on Soft X-ray Optics: Technical Challenges, T. Namioka, H. Kinoshita, and K. Ito, Editors, Tokyo, JA
DA  - 1997-01-01
LA  - en
PB  - Proceedings of Japan Society for Precision Engineering: U.S.-Japan Workshop on Soft X-ray Optics: Technical Challenges, T. Namioka, H. Kinoshita, and K. Ito, Editors, Tokyo, JA
PY  - 1997
TI  - Finish and Figure Metrology for Soft X-ray Optics
ER  -