TY  - CONF
AU  - James Potzick
C2  - Proceedings of SPIE, Metrology, Inspection, and Process Control for Microlithography XII, Bhanwar Singh, Editor, Santa Clara, CA
DA  - 1998-06-01
LA  - en
M1  - 3332
PB  - Proceedings of SPIE, Metrology, Inspection, and Process Control for Microlithography XII, Bhanwar Singh, Editor, Santa Clara, CA
PY  - 1998
TI  - Accuracy and Traceability in Dimensional Measurements
ER  -