TY  - JOUR
AU  - Michael Postek
AU  - Andras Vladar
AU  - J Lowney
AU  - William Keery
C2  - Scanning
DA  - 2002-07-01
LA  - en
M1  - 24(4)
PB  - Scanning
PY  - 2002
TI  - Two-dimensional Simulation Modeling in Imaging and Metrology Research
ER  -