TY  - CONF
AU  - John Villarrubia
C2  - Proceedings of SPIE, Metrology, Inspection, and Process Control for Microlithography XII, Bhanwar Singh, Editor
DA  - 1998-06-01
LA  - en
M1  - 3332
PB  - Proceedings of SPIE, Metrology, Inspection, and Process Control for Microlithography XII, Bhanwar Singh, Editor
PY  - 1998
TI  - Strategy for Faster Blind Reconstruction of Tip Geometry for Scanned Probe Microscopy
ER  -