TY  - CONF
AU  - John Villarrubia
AU  - Andras Vladar
AU  - J Lowney
AU  - Michael Postek
C2  - Proceedings of SPIE, Metrology, Inspection, and Process Control for Microlithography XV, Neal T. Sullivan, Editor, Santa Clara, CA
DA  - 2001-08-01
LA  - en
M1  - 4344
PB  - Proceedings of SPIE, Metrology, Inspection, and Process Control for Microlithography XV, Neal T. Sullivan, Editor, Santa Clara, CA
PY  - 2001
TI  - Edge Determination for Polycrystalline Silicon Lines on Gate Oxide
ER  -