TY  - SER
AU  - John Villarrubia
C2  - Springer-Verlag, Berlin Heidelberg, New York, NY
DA  - 2004-01-01
LA  - en
PB  - Springer-Verlag, Berlin Heidelberg, New York, NY
PY  - 2004
TI  - Tip Characterization for Dimensional Nanometrology
ER  -