TY  - CONF
AU  - Michael Postek
AU  - Andras Vladar
AU  - Marylyn Bennett
C2  - Proceedings of SPIE, 22nd Annual BACUS Symposium on Photomask Technology, Brian J. Grenon, Kurt R. Kimmel, Editors, Monterey, CA
DA  - 2002-12-01
LA  - en
M1  - 4889
PB  - Proceedings of SPIE, 22nd Annual BACUS Symposium on Photomask Technology, Brian J. Grenon, Kurt R. Kimmel, Editors, Monterey, CA
PY  - 2002
TI  - Photomask Dimensional Metrology in the SEM: Has Anything Really Changed?
ER  -