TY  - JOUR
AU  - John Villarrubia
AU  - Andras Vladar
AU  - J Lowney
AU  - Samuel Jones
AU  - Michael Postek
C2  - Scanning
DA  - 2000-05-01
LA  - en
M1  - 22(2)
PB  - Scanning
PY  - 2000
TI  - Applications of SEM Monte Carlo Modeling to Geometry Determination in Single-Crystal Silicon Test Patterns
ER  -