TY  - JOUR
AU  - John Villarrubia
AU  - Andras Vladar
AU  - J Lowney
AU  - Michael Postek
C2  - Proceedings of SCANNING 2001 May 5-7, 2001 New York, New York, USA
DA  - 2001-03-01
LA  - en
M1  - 23(2)
PB  - Proceedings of SCANNING 2001 May 5-7, 2001 New York, New York, USA
PY  - 2001
TI  - Shape-Sensitive Linewidth Measurement with the SEM Using a Model-Based Library
ER  -