TY  - CONF
AU  - Richard Silver
AU  - Jay Jun
AU  - Edward Kornegay
AU  - R Morton
C2  - Proceedings of SPIE, Metrology, Inspection, and Process Control for Microlithography XV, Neal T. Sullivan, Editor
DA  - 2001-08-01
LA  - en
M1  - 4344
PB  - Proceedings of SPIE, Metrology, Inspection, and Process Control for Microlithography XV, Neal T. Sullivan, Editor
PY  - 2001
TI  - Comparison of Edge Detection Methods Using a Prototype Overlay Calibration Artifact
ER  -