TY  - CONF
AU  - John Villarrubia
AU  - Ronald Dixson
AU  - Samuel Jones
AU  - J Lowney
AU  - Michael Postek
AU  - Richard Allen
AU  - Michael Cresswell
C2  - Proceedings of SPIE, Metrology, Inspection, and Process Control for Microlithography XIII, Bhanwar Singh, Editor
DA  - 1999-06-01
LA  - en
M1  - 3677
PB  - Proceedings of SPIE, Metrology, Inspection, and Process Control for Microlithography XIII, Bhanwar Singh, Editor
PY  - 1999
TI  - Intercomparison of SEM, AFM, and Electrical Linewidths
ER  -