TY - CONF AU - James Potzick C2 - Proceedings of the 188th PTB Seminar on CD Metrology; H. Bosse, B. Bodermann, W. Mirande` Editors; Physikalisch-Technische Bundesanstalt (PTB), Braunschweig, GE DA - 2003-11-01 LA - en PB - Proceedings of the 188th PTB Seminar on CD Metrology; H. Bosse, B. Bodermann, W. Mirande` Editors; Physikalisch-Technische Bundesanstalt (PTB), Braunschweig, GE PY - 2003 TI - Optical Photomask CD Metrology at NIST ER -