TY  - CONF
AU  - Egon Marx
AU  - I Malik
AU  - T Bristow
AU  - N Poduje
AU  - J Stover
C2  - Proceedings of 2000 International Conference on Characterization and Metrology
DA  - 2000-01-01
LA  - en
PB  - Proceedings of 2000 International Conference on Characterization and Metrology
PY  - 2000
TI  - Power Spectral Density Functions for Si Wafer Surfaces Using Six Measurement Techniques
ER  -