TY  - CONF
AU  - Dennis Swyt
C2  - Proceedings of PTB 2001 Seminar on High-Precision Length Metrology, GE
DA  - 2001-01-01
LA  - en
PB  - Proceedings of PTB 2001 Seminar on High-Precision Length Metrology, GE
PY  - 2001
TI  - Developments at NIST in High-Precision Length Metrology for Microelectronics
ER  -