TY  - CONF
AU  - Michael Postek
C2  - Proceedings of SPIE, Nanostructure Science, Metrology, and Technology, Martin C. Peckerar, Michael T. Postek, Jr., Editors, Gaithersburg, MD
DA  - 2002-07-01
LA  - en
M1  - 4608
PB  - Proceedings of SPIE, Nanostructure Science, Metrology, and Technology, Martin C. Peckerar, Michael T. Postek, Jr., Editors, Gaithersburg, MD
PY  - 2002
TI  - Nanometer-Scale Metrology: Meeting the Nanotechnology Measurement Challenges
ER  -