TY  - CONF
AU  - John Villarrubia
AU  - Andras Vladar
AU  - Michael Postek
C2  - Proceedings of SPIE, Metrology, Inspection, and Process Control for Microlithography XVII, Daniel J. Herr, Editor, Santa Clara, CA
DA  - 2003-05-01
LA  - en
M1  - 5038
PB  - Proceedings of SPIE, Metrology, Inspection, and Process Control for Microlithography XVII, Daniel J. Herr, Editor, Santa Clara, CA
PY  - 2003
TI  - A Simulation Study of Repeatability and Bias in the CD-SEM
ER  -