TY  - CONF
AU  - Ronald Dixson
AU  - R Koning
AU  - Theodore Vorburger
AU  - Joseph Fu
AU  - V Tsai
C2  - Proceedings of SPIE, Metrology, Inspection, and Process Control for Microlithography XII, Bhanwar Singh, Editor, Santa Clara, CA
DA  - 1998-06-01
LA  - en
M1  - 3332
PB  - Proceedings of SPIE, Metrology, Inspection, and Process Control for Microlithography XII, Bhanwar Singh, Editor, Santa Clara, CA
PY  - 1998
TI  - Measurement of Pitch and Width Samples with the NIST Calibrated Atomic Force Microscope
ER  -